| 品牌 | 昊量光電 | 價格區(qū)間 | 面議 |
|---|---|---|---|
| 產(chǎn)地類別 | 國產(chǎn) | 應用領(lǐng)域 | 電子/電池,汽車及零部件,綜合 |
非接觸式方阻成像儀EddyCus TF Map
EddyCus TF Map 2530SR是一種非接觸式薄層電阻映射系統(tǒng)。該設(shè)備配備了一個運動的渦流傳感器，每次掃描可測量高達90000 (300 x 300)測量點的方塊電阻。由于這種技術(shù)不需要與標本進行物理接觸，該設(shè)備可以在飛行運動中進行測量。此外，非接觸式單點方阻測試儀具有很高的準確性，因為它是獨立于任何接觸質(zhì)量。非接觸式薄膜方塊電阻測量儀樣品中測量點的高密度確保了沒有遺漏任何效果或缺陷。此外，綜合分析功能支持生產(chǎn)和研發(fā)實驗室中各種薄膜的系統(tǒng)質(zhì)量保證。
非接觸式方阻成像儀EddyCus TF Map主要測試對象：
鍍膜建筑玻璃，如LowE
顯示器，觸摸屏和平板顯示器
OLED和LED
智能玻璃
石墨烯層
光伏晶圓和電池
半導體晶片
金屬化層和晶圓金屬化
電池電極
導電涂布紙和導電紡織品
非接觸式方阻成像儀的規(guī)格：
| Measurement technology | Non-contact eddy current sensor |
| substrates | Wafer, glass, foils etc. |
| Max. scanning area | 12 inch / 300 mm x 300 mm (larger upon request) |
| Edge effect correction / exclusion | 2 – 10 mm (depending on size, range, setup and requirements) |
| Max. sample thickness / sensor gap | 3 / 5 / 10 / 15 mm (defined by the thickest sample) |
| Thickness measurement of metal films (e.g. aluminum, copper) | 2 nm – 2 mm (in accordance with sheet resistance ()) |
| Scanning pitch | 1 / 2.5 / 5 / 10 / 25 mm (other upon request) |
| Measurement points per time (square shaped samples) | 100 measurement points in 0.5 minutes 10,000 measurement points in 3 minutes |
| Scanning time | 8 inch / 200 mm x 200 mm in 1 to 10 minutes (1 – 10 mm pitch) 12 inch / 300 mm x 300 mm in 2 to 6 minutes (2.5 – 25 mm pitch) |
| Device dimensions (w/h/d) | 31.5" x 19.1" x 33.5" / 785 mm x 486 mm x 850 mm |
| Weight | 90 kg |
| Further available features | Metal thickness imaging, anisotropy and sheet resistance sensor |
| VLSR | LSR | MSR | HSR | VHSR | |
|---|---|---|---|---|---|
| 6 decades are measurable by one sensor, but with slightly affected accuracy | |||||
| Range [Ohm/sq] | 0.0001 – 0.1 | 0.1 – 10 | 0.1 – 100 | 10 – 2,000 | 1,000 – 200,000 |
| Accuracy / Bias | ± 1% | ± 1 – 3% | ± 3 – 5% | ||
| Repeatability (2σ) | < 0.5% | < 1% | < 0.5% | ||
| VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistance | |||||
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